Electrical force and/or deformation sensor, particularly for use

Details Electrical force and/or deformation sensor, particularly for use Electrical force and/or deformation sensor, particularly for use

1990-04-12

1990-10-30

Woodiel, Donald O.

Measuring and testing

Fluid pressure gauge

Diaphragm

338 4, G01L 122, G01L 708, G01L 906

Patent

active

049660390

ABSTRACT:
An electrical force and/or deformation sensor includes a support structure constituted by a rigid plate in one face of which a recess is formed. The bottom wall of the recess is thin and is resiliently deformable under the action of a force or pressure to be measured. At least one piezoresistive sensitive element constituted by a thick-film resistor is applied to the other face of the plate in correspondence with the recess. Electrical conductor elements connected to the sensitive element or elements are also applied to this face of the plate to enable its connection to supply and processing circuits. These circuits may conveniently be produced by thick- or thin-film hybrid circuit technology on the same face of the support plate as that which carries the piezoresistive element or elements. In order to measure absolute pressure, the inlet opening of the recess may be closed by a gas-tight seal so as to define a closed cavity in the thickness of the plate, in which a vacuum is formed.

REFERENCES:
patent: 4444054 (1984-04-01), Schaff, Jr.
patent: 4481497 (1984-11-01), Kurtz et al.
patent: 4576052 (1986-03-01), Sugiyama
patent: 4672354 (1985-12-01), Kurtz et al.
patent: 4777826 (1988-10-01), Rud, Jr. et al.
patent: 4864271 (1989-09-01), Yajima

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