Electrical contacts in microelectromechanical devices with...

Optical: systems and elements – Optical modulator – Light wave temporal modulation

Reexamination Certificate

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C359S291000, C359S298000

Reexamination Certificate

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07110160

ABSTRACT:
Disclosed herein a microelectromechanical device having first and second substrates that are bonded together with a gap formed therebetween. A plurality of functional members is disposed within the gap. The two substrates are bonded with a bonding agent that comprises an electrically conductive adhesive material.

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John Gould, TechnologyWatch Mini Briefing, Polymer Electronics, 2004, pp. 1-6.

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