Optical: systems and elements – Optical modulator – Light wave temporal modulation
Reexamination Certificate
2006-09-19
2006-09-19
Ben, Loha (Department: 2873)
Optical: systems and elements
Optical modulator
Light wave temporal modulation
C359S291000, C359S298000
Reexamination Certificate
active
07110160
ABSTRACT:
Disclosed herein a microelectromechanical device having first and second substrates that are bonded together with a gap formed therebetween. A plurality of functional members is disposed within the gap. The two substrates are bonded with a bonding agent that comprises an electrically conductive adhesive material.
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Doan Jonathan
Patel Satyadev
Richards Peter
Tarn Terry
Ben Loha
Dinh Jack
Muir Gregory R.
Reflectivity, INC
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