Electrical contacts for an electro-optic modulator

Details Electrical contacts for an electro-optic modulator Electrical contacts for an electro-optic modulator

1990-05-17

1992-09-01

Hille, Rolf

Optical: systems and elements

Optical modulator

Light wave temporal modulation

359245, 359246, G02F 103

Patent

active

051444720

ABSTRACT:
A contact structure and method of formation of a contact structure for an electro-optic modulator. Linear electrodes on a modulator crystal are covered with a dielectric layer. The electrodes are contacted by way of one or more vias through the dielectric layer. Contact pads are formed over the vias so as to contact the electrode and extend over several adjacent electrodes, providing significantly greater contact area for a driver chip applied to the modulator crystal.

REFERENCES:
patent: 4367925 (1983-01-01), Sprague et al.
patent: 4369457 (1983-01-01), Sprague et al.
patent: 4712857 (1987-12-01), Lee

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