Electricity: electrical systems and devices – Electrostatic capacitors – Variable
Patent
1984-09-17
1986-04-08
Griffin, Donald A.
Electricity: electrical systems and devices
Electrostatic capacitors
Variable
73718, H01G 700, G01L 912
Patent
active
045816760
ABSTRACT:
An electrostatically bonded capacitive pressure measuring transducer constructed with a silicon diaphragm member sandwitched between a top silicon support plate and a bottom silicon support plate each of which has a via hole extending therethrough, a thin layer of borosilicate glass interposed between the diaphragm and each of the support plates, a metallized deposit extending through the via holes and over a part of the surface of each of the glass layers opposite the diaphragm to form with the diaphragm two variable capacitors which will be electrically contacted by spring loaded plunger type contacts, and a layer of platinum silicide deposited on the top of the silicon diaphragm and the top of each of the silicon plates as an electrical contact coating providing a contact surface for the plunger type contacts.
REFERENCES:
patent: 3557621 (1971-01-01), Ferran
patent: 4168518 (1979-09-01), Lee
patent: 4424713 (1984-01-01), Kroninger et al.
patent: 4433580 (1984-02-01), Tward
patent: 4445383 (1984-05-01), Binder et al.
Academic Press 1983, Murarka Silicides for VLSI Applications, pp. 30-33, 56, 126, and 167-171.
Baxter Ronald D.
Kroninger, Jr. Paul M.
General Signal Corporation
Griffin Donald A.
Huberfeld Harold
Miller, Jr. William G.
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