Electrical connections in microelectromechanical devices

Details Electrical connections in microelectromechanical devices Electrical connections in microelectromechanical devices

2005-07-13

2008-10-14

Sugarman, Scott J. (Department: 2873)

Optical: systems and elements

Optical modulator

Light wave temporal modulation

C359S224200

Reexamination Certificate

active

07436573

ABSTRACT:
A micromirror device and a method of making the same are disclosed herein. The micromirror device comprises a mirror plate, hinge, and post each having an electrically conductive layer. One of the hinge, mirror plate, and post further comprises an electrically insulating layer. To enable the electrical connections between the conducting layers of the hinge, mirror plate, and post, the insulating layer is patterned.

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