Metal working – Method of mechanical manufacture – Electrical device making
Patent
1993-03-01
1994-06-28
Arbes, Carl J.
Metal working
Method of mechanical manufacture
Electrical device making
29424, 29829, 29848, 1563073, 437209, H01K 310
Patent
active
053235355
ABSTRACT:
A method of manufacturing an electrical connecting member having a holding member formed of an electrically insulative material, and a plurality of electrically conductive members provided in a mutually insulated state in the holding member, one end of each of the electrically conductive members being exposed on one surface of the holding member and the other end of each of the electrically conductive members being exposed on the other surface of the holding member, includes the steps of providing photosensitive resin which provides the holding member on a base body, applying light to the photosensitive resin through a photomask forming a predetermined pattern to thereby expose the photosensitive resin to the light, developing the photosensitive resin to form a plurality of apertures in the photosensitive resin, thereby exposing the base body, leaving the photosensitive resin through which the base body has been exposed in a heated atmosphere and/or a negative pressure atmosphere for a predetermined time, etching the exposed portions of the base body to thereby form recesses communicating with the apertures, filling the apertures and the recesses with an electrically conductive material which provides the electrically conductive members, and removing the remaining portions of the base body.
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K. D. Norris, et al., "Reliability of Controlled Collapse Interconnections," IBM Journal of Research and Development Index vol. 13, pp. 266-271 (May 1969).
Ikegami Yuichi
Kondo Hiroshi
Kondo Kazuo
Miyazaki Toyohide
Nakatsuka Yasuo
Arbes Carl J.
Canon Kabushiki Kaisha
Sumitomo Metal Industries Ltd.
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