Electrical conditioning of MEMS device and insulating layer...

Details Electrical conditioning of MEMS device and insulating layer... Electrical conditioning of MEMS device and insulating layer...

2006-02-22

2009-06-16

Ghyka, Alexander G (Department: 2812)

Semiconductor device manufacturing: process

Making device or circuit responsive to nonelectrical signal

C438S050000, C438S051000, C438S053000, C257SE21001

Reexamination Certificate

active

07547568

ABSTRACT:
A method of fabricating a MEMS device includes conditioning of an insulating layer by applying a voltage across the insulating layer via a conductive sacrificial layer for a period of time, prior to removal of the conductive sacrificial layer. This conditioning process may be used to saturate or stabilize charge accumulated within the insulating layer. The resistance across the insulating layer may also be measured to detect possible defects in the insulating layer.

REFERENCES:
patent: 2534846 (1950-12-01), Ambrose et al.
patent: 3439973 (1969-04-01), Paul et al.
patent: 3443854 (1969-05-01), Weiss
patent: 3616312 (1971-10-01), McGriff et al.
patent: 3653741 (1972-04-01), Marks
patent: 3656836 (1972-04-01), de Cremoux et al.
patent: 3725868 (1973-04-01), Malmer, Jr. et al.
patent: 3813265 (1974-05-01), Marks
patent: 3955880 (1976-05-01), Lierke
patent: 4099854 (1978-07-01), Decker et al.
patent: 4196396 (1980-04-01), Smith
patent: 4228437 (1980-10-01), Shelton
patent: 4377324 (1983-03-01), Durand et al.
patent: 4389096 (1983-06-01), Hori et al.
patent: 4392711 (1983-07-01), Moraw et al.
patent: 4403248 (1983-09-01), te Velde
patent: 4441791 (1984-04-01), Hornbeck
patent: 4445050 (1984-04-01), Marks
patent: 4459182 (1984-07-01), te Velde
patent: 4482213 (1984-11-01), Piliavin et al.
patent: 4500171 (1985-02-01), Penz et al.
patent: 4519676 (1985-05-01), te Velde
patent: 4531126 (1985-07-01), Sadones
patent: 4566935 (1986-01-01), Hornbeck
patent: 4571603 (1986-02-01), Hornbeck et al.
patent: 4596992 (1986-06-01), Hornbeck
patent: 4615595 (1986-10-01), Hornbeck
patent: 4617608 (1986-10-01), Blonder et al.
patent: 4662746 (1987-05-01), Hornbeck
patent: 4663083 (1987-05-01), Marks
patent: 4681403 (1987-07-01), te Velde et al.
patent: 4710732 (1987-12-01), Hornbeck
patent: 4748366 (1988-05-01), Taylor
patent: 4786128 (1988-11-01), Birnbach
patent: 4790635 (1988-12-01), Apsley
patent: 4856863 (1989-08-01), Sampsell et al.
patent: 4859060 (1989-08-01), Katagiri et al.
patent: 4900136 (1990-02-01), Goldburt et al.
patent: 4900395 (1990-02-01), Syverson et al.
patent: 4937496 (1990-06-01), Neiger et al.
patent: 4954789 (1990-09-01), Sampsell
patent: 4956619 (1990-09-01), Hornbeck
patent: 4965562 (1990-10-01), Verhulst
patent: 4982184 (1991-01-01), Kirkwood
patent: 5018256 (1991-05-01), Hornbeck
patent: 5022745 (1991-06-01), Zahowski et al.
patent: 5028939 (1991-07-01), Hornbeck et al.
patent: 5037173 (1991-08-01), Sampsell et al.
patent: 5044736 (1991-09-01), Jaskie et al.
patent: 5061049 (1991-10-01), Hornbeck
patent: 5075796 (1991-12-01), Schildkraut et al.
patent: 5078479 (1992-01-01), Vuilleumier
patent: 5079544 (1992-01-01), DeMond et al.
patent: 5083857 (1992-01-01), Hornbeck
patent: 5096279 (1992-03-01), Hornbeck et al.
patent: 5099353 (1992-03-01), Hornbeck
patent: 5124834 (1992-06-01), Cusano et al.
patent: 5136669 (1992-08-01), Gerdt
patent: 5142405 (1992-08-01), Hornbeck
patent: 5142414 (1992-08-01), Koehler
patent: 5153771 (1992-10-01), Link et al.
patent: 5162787 (1992-11-01), Thompson et al.
patent: 5168406 (1992-12-01), Nelson
patent: 5170156 (1992-12-01), DeMond et al.
patent: 5172262 (1992-12-01), Hornbeck
patent: 5179274 (1993-01-01), Sampsell
patent: 5192395 (1993-03-01), Boysel et al.
patent: 5192946 (1993-03-01), Thompson et al.
patent: 5206629 (1993-04-01), DeMond et al.
patent: 5212582 (1993-05-01), Nelson
patent: 5214419 (1993-05-01), DeMond et al.
patent: 5214420 (1993-05-01), Thompson et al.
patent: 5216537 (1993-06-01), Hornbeck
patent: 5226099 (1993-07-01), Mignardi et al.
patent: 5228013 (1993-07-01), Bik
patent: 5231532 (1993-07-01), Magel et al.
patent: 5233385 (1993-08-01), Sampsell
patent: 5233456 (1993-08-01), Nelson
patent: 5233459 (1993-08-01), Bozler et al.
patent: 5254980 (1993-10-01), Hendrix et al.
patent: 5272473 (1993-12-01), Thompson et al.
patent: 5278652 (1994-01-01), Urbanus et al.
patent: 5280277 (1994-01-01), Hornbeck
patent: 5287096 (1994-02-01), Thompson et al.
patent: 5293272 (1994-03-01), Jannson et al.
patent: 5296950 (1994-03-01), Lin et al.
patent: 5299041 (1994-03-01), Morin et al.
patent: 5305640 (1994-04-01), Boysel et al.
patent: 5311360 (1994-05-01), Bloom et al.
patent: 5312513 (1994-05-01), Florence et al.
patent: 5323002 (1994-06-01), Sampsell et al.
patent: 5324683 (1994-06-01), Fitch et al.
patent: 5325116 (1994-06-01), Sampsell
patent: 5326430 (1994-07-01), Cronin et al.
patent: 5327286 (1994-07-01), Sampsell et al.
patent: 5330617 (1994-07-01), Haond
patent: 5331454 (1994-07-01), Hornbeck
patent: 5339116 (1994-08-01), Urbanus et al.
patent: 5345328 (1994-09-01), Fritz et al.
patent: 5347377 (1994-09-01), Revelli, Jr. et al.
patent: 5355357 (1994-10-01), Yamamori et al.
patent: 5358601 (1994-10-01), Cathey
patent: 5365283 (1994-11-01), Doherty et al.
patent: 5381232 (1995-01-01), van Wijk
patent: 5381253 (1995-01-01), Sharp et al.
patent: 5401983 (1995-03-01), Jokerst et al.
patent: 5411769 (1995-05-01), Hornbeck
patent: 5444566 (1995-08-01), Gale et al.
patent: 5446479 (1995-08-01), Thompson et al.
patent: 5448314 (1995-09-01), Heimbuch et al.
patent: 5452024 (1995-09-01), Sampsell
patent: 5454906 (1995-10-01), Baker et al.
patent: 5457493 (1995-10-01), Leddy et al.
patent: 5457566 (1995-10-01), Sampsell et al.
patent: 5459602 (1995-10-01), Sampsell
patent: 5459610 (1995-10-01), Bloom et al.
patent: 5461411 (1995-10-01), Florence et al.
patent: 5474865 (1995-12-01), Vasudev
patent: 5489952 (1996-02-01), Gove et al.
patent: 5497172 (1996-03-01), Doherty et al.
patent: 5497197 (1996-03-01), Gove et al.
patent: 5499037 (1996-03-01), Nakagawa et al.
patent: 5499062 (1996-03-01), Urbanus
patent: 5500635 (1996-03-01), Mott
patent: 5500761 (1996-03-01), Goossen et al.
patent: 5503952 (1996-04-01), Suzuki et al.
patent: 5506597 (1996-04-01), Thompson et al.
patent: 5515076 (1996-05-01), Thompson et al.
patent: 5517347 (1996-05-01), Sampsell
patent: 5523803 (1996-06-01), Urbanus et al.
patent: 5526051 (1996-06-01), Gove et al.
patent: 5526172 (1996-06-01), Kanack
patent: 5526327 (1996-06-01), Cordova, Jr.
patent: 5526688 (1996-06-01), Boysel et al.
patent: 5535047 (1996-07-01), Hornbeck
patent: 5548301 (1996-08-01), Kornher et al.
patent: 5551293 (1996-09-01), Boysel et al.
patent: 5552924 (1996-09-01), Tregilgas
patent: 5552925 (1996-09-01), Worley
patent: 5559358 (1996-09-01), Burns et al.
patent: 5563398 (1996-10-01), Sampsell
patent: 5567334 (1996-10-01), Baker et al.
patent: 5570135 (1996-10-01), Gove et al.
patent: 5579149 (1996-11-01), Moret et al.
patent: 5581272 (1996-12-01), Conner et al.
patent: 5583688 (1996-12-01), Hornbeck
patent: 5589852 (1996-12-01), Thompson et al.
patent: 5597736 (1997-01-01), Sampsell
patent: 5600383 (1997-02-01), Hornbeck
patent: 5602671 (1997-02-01), Hornbeck
patent: 5606441 (1997-02-01), Florence et al.
patent: 5608468 (1997-03-01), Gove et al.
patent: 5610438 (1997-03-01), Wallace et al.
patent: 5610624 (1997-03-01), Bhuva
patent: 5610625 (1997-03-01), Sampsell
patent: 5619059 (1997-04-01), Li et al.
patent: 5619365 (1997-04-01), Rhoades et al.
patent: 5619366 (1997-04-01), Rhoads et al.
patent: 5622814 (1997-04-01), Miyata et al.
patent: 5629790 (1997-05-01), Neukermans et al.
patent: 5633652 (1997-05-01), Kanbe et al.
patent: 5636052 (1997-06-01), Arney et al.
patent: 5636185 (1997-06-01), Brewer et al.
patent: 5638084 (1997-06-01), Kalt
patent: 5638946 (1997-06-01), Zavracky
patent: 5641391 (1997-06-01), Hunter et al.
patent: 5646768 (1997-07-01), Kaeiyama
patent: 5647819 (1997-07-01), Fujita et al.
patent: 5650834 (1997-07-01), Nakagawa et al.
patent: 5650881 (1997-07-01), Hornbeck
patent: 5654741 (1997-08-01), Sampsell et al.
patent: 5657099 (1997-08-01), Doherty et al.
patent: 5659374 (1997-08-01), Gale, Jr. et al.
patent: 5665997 (1997-09-01), Weaver et al.
patent: 5673139 (1997-09-01), Johnson
patent: 5674757 (1997-10-01), Kim
patent: 5683591 (1997-11-01), Offenberg
patent: 5703710 (1997-12-01), Brinkman et al.
patent: 5706022 (1998-01-01), Hato
patent: 5710656 (1998-01-01), Goosen
patent: 5726480 (1998-03-01), Pister
patent: 5739945 (1998-04-01), Tayebati
patent: 5745193 (1998-04-

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