Electricity: measuring and testing – Fault detecting in electric circuits and of electric components – For fault location
Reexamination Certificate
2011-04-26
2011-04-26
Dole, Timothy J (Department: 2858)
Electricity: measuring and testing
Fault detecting in electric circuits and of electric components
For fault location
C324S548000, C359S302000, C359S320000, C438S057000
Reexamination Certificate
active
07932728
ABSTRACT:
A method of fabricating a MEMS device includes conditioning of an insulating layer by applying a voltage across the insulating layer via a conductive sacrificial layer for a period of time, prior to removal of the conductive sacrificial layer. This conditioning process may be used to saturate or stabilize charge accumulated within the insulating layer. The resistance across the insulating layer may also be measured to detect possible defects in the insulating layer.
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Brinkley Patrick F.
Chou Chen-Jean
Wu Chun-chen
Baldridge Benjamin M
Dole Timothy J
Knobbe Martens Olson & Bear LLP
QUALCOMM MEMS Technologies Inc.
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