Electricity: measuring and testing – Measuring – testing – or sensing electricity – per se – With rotor
Patent
1988-06-20
1989-11-28
Eisenzopf, Reinhard J.
Electricity: measuring and testing
Measuring, testing, or sensing electricity, per se
With rotor
324 73PC, G01R 3126, G01R 106
Patent
active
048840262
ABSTRACT:
An electrical characteristic measuring apparatus including, a table for an object to be measured, wherein the table is formed of an insulating material. The generation of an eddy current by an electromagnetic induction effect due to noise can be prevented from occurring in the table. Therefore, the electrical characteristics of the object to be measured can be measured using a very small current with high accuracy. Further, since the insulating resistance of the table is high, electrical discharging can be prevented from occurring between the object to be measured and a ground portion when measuring with a large current. As a result, electrical characteristics can be measured with high accuracy using a large current which is 50 times or more that of a current used in a conventional apparatus.
REFERENCES:
patent: 4520421 (1985-05-01), Sakitani et al.
patent: 4567432 (1986-01-01), Buol et al.
patent: 4590422 (1986-05-01), Milligan
patent: 4692836 (1987-09-01), Suzuki
Hayakawa Yuji
Uchida Takuo
Eisenzopf Reinhard J.
Nguyen Vinh P.
Tokyo Electron Limited
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