Electric transducer for measuring mechanical quantities

Details Electric transducer for measuring mechanical quantities Electric transducer for measuring mechanical quantities

1986-04-24

1988-09-20

James, Andrew J.

357 231, 73517R, H01L 2984, H01L 2996

Patent

active

047729287

ABSTRACT:
An electric transducer for measuring mechanical quantities comprises a movable tongue which is acted upon by the mechanical quantity to be measured and the deflection of which is converted into an electrical signal. The tip of the tongue may be designed as the gate and an electric conduction channel disposed opposite the tip at a small distance therefrom may comprise the source-drain path of a field effect transistor, or vice versa.

REFERENCES:
patent: 3413573 (1968-11-01), Nathanson et al.
patent: 3533022 (1970-10-01), Engeler et al.
patent: 3585466 (1971-06-01), Davis, Jr. et al.
patent: 4342227 (1982-08-01), Petersen et al.
patent: 4480488 (1984-11-01), Read et al.
patent: 4571661 (1986-02-01), Hoshino
patent: 4653326 (1987-03-01), Danel et al.
Chen, Pau-Ling, et al., "Integrated Silicon Microbeam PI-FET Accelerometer", IEEE Tras. on Elec. Dev., vol. ED-29, No. 1, Jan. 1982, pp. 27-33.

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