Electric thin-film circuit and method for its production

Details Electric thin-film circuit and method for its production Electric thin-film circuit and method for its production

1974-06-19

1976-04-06

Scott, James R.

Chemistry: electrical and wave energy

Apparatus

Coating, forming or etching by sputtering

317258, 357 4, 75138, 75174, 204 15, 156 7, 333 70CR, H02B 104, B05D 512, H01L 2712

Patent

active

039492753

ABSTRACT:
An electric thin-film circuit has a conductor path and at least one capacitor and/or one resistor, and it comprises a substrate base member with a first tantalum-aluminum-alloy layer formed thereupon, and is etched to form the outline of the conductor path. A second tantalum-aluminum-alloy layer with a tantalum content of approximately 2 through 20 atomic percent is disposed thereupon, at least in the area of a capacitor, and an oxidation layer is formed upon this second tantalum-aluminum-alloy layer to constitute the capacitor dielectric. The conductor paths and the opposite capacitor electrode are formed of a conductive layer such as a nickel-chromium-gold layer.

REFERENCES:
patent: 2179960 (1939-11-01), Schwarzkopf
patent: 3172196 (1965-03-01), Beaver et al.
patent: 3198628 (1965-08-01), Layne et al.
patent: 3217209 (1965-11-01), Kinsella et al.
patent: 3386011 (1968-05-01), Murray, Jr. et al.
patent: 3387952 (1968-06-01), La Chapelle
patent: 3406043 (1968-10-01), Balde
patent: 3607476 (1971-09-01), Besamat et al.
patent: 3607679 (1971-09-01), Melroy et al.
patent: 3616282 (1971-10-01), Bodway
patent: 3699011 (1972-10-01), Nishimura
patent: 3718565 (1973-02-01), Pelletier
patent: 3781610 (1973-12-01), Bodway

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