Electric probing test machine

Details Electric probing test machine Electric probing test machine

1990-01-26

1990-08-21

Eisenzopf, Reinhard J.

Electricity: measuring and testing

Measuring, testing, or sensing electricity, per se

With rotor

324158P, 324158R, 198394, 198395, G01R 3122, B65G 4724

Patent

active

049509829

ABSTRACT:
An electric probing test machine including a test stage unit which is constructed as an independent component of at least one system and used to test the electrical characteristics of a wafer by having the wafer on the stage contacted by a multitude of probes and a loading/unloading unit which is constructed as an independent component of at least one system and used to bring a wafer from a wafer cassette to the stage of the test stage unit or from the stage of the test stage unit to the wafer cassette. The loading/unloading unit is combined with the test stage unit in such a way that the loading/unloading unit can be separated and moved away from the test stage unit.

REFERENCES:
patent: 3408565 (1968-10-01), Frick et al.
patent: 3488097 (1970-01-01), Fall
patent: 4067632 (1978-01-01), Sekerich
patent: 4103232 (1978-07-01), Sugita et al.
patent: 4662761 (1987-05-01), Hoffman
patent: 4760924 (1988-08-01), Sato et al.
patent: 4786867 (1988-11-01), Yamatsu
patent: 4807152 (1989-02-01), Lane et al.
patent: 4899105 (1990-02-01), Akiyama
patent: 4901011 (1990-02-01), Koike et al.

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