Electric multipole lens

Details Electric multipole lens Electric multipole lens

1988-11-04

1989-09-26

Berman, Jack I.

Radiant energy

With charged particle beam deflection or focussing

Magnetic lens

250292, 250290, 3133611, H01J 318, H01J 4942

Patent

active

048702838

ABSTRACT:
A multipole lens which focus or diffuse a charged particle beam having a metal cylinder mounted on the vacuum vessel and formed plural recesses on the inside wall of the meal cylinder, and plural cylindrical electrodes respectively mounted on said plural recesses through thin insulator. The cross-sectional shape of the each recess is a circular arcwise and the recess is formed along an central axis of the metal cylinder.
For example, the multipole lens in the present invention is used in a electrostatic quadrupole lens of mass spectrometer or used in a quadrupole mass spectrometer.
In this invention electric charging at the insulator is so little that the orbit of the charged particle beam can be very accurate for a long time.

REFERENCES:
patent: 3410997 (1968-11-01), Brubaker
patent: 4032782 (1977-06-01), Smith et al.

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