Electric motors with reduced stray magnetic fields

Details Electric motors with reduced stray magnetic fields Electric motors with reduced stray magnetic fields

2005-03-08

2005-03-08

Mullins, Burton S. (Department: 2834)

Electrical generator or motor structure

Dynamoelectric

Linear

C355S053000

Reexamination Certificate

active

06864601

ABSTRACT:
A linear electric motor (10) including a magnet component (12), a conductor component (14) that interacts with the magnet component (12) and a control system (15) for directing current to the conductor component (14) is provided herein. Uniquely, the conductor component (14) minimizes the total stray magnetic fields generated by the conductor component (14), without significantly influencing the dynamic performance of the motor (10). Because of the conductor component (14) provided herein, the motor (10) is particularly useful in manufacturing, measurement and/or inspection processes that are sensitive and/or influenced by stray AC magnetic fields. More specifically, the present invention is particularly useful with an exposure apparatus (18) that utilizes an illumination system (24) that generates a charged particle beam, such as an electron beam.

REFERENCES:
patent: 4560911 (1985-12-01), Chitayat
patent: 5084644 (1992-01-01), Harris et al.
patent: RE34674 (1994-07-01), Beakley et al.
patent: 5955808 (1999-09-01), Hill
patent: 6046518 (2000-04-01), Williams
patent: 6127749 (2000-10-01), Sogard
patent: 6144118 (2000-11-01), Cahill et al.
patent: 6265793 (2001-07-01), Korenaga
patent: 6300691 (2001-10-01), Hwang et al.
patent: 6316849 (2001-11-01), Konkola et al.

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