Electric heater for a semiconductor processing apparatus

Details Electric heater for a semiconductor processing apparatus Electric heater for a semiconductor processing apparatus

2006-04-11

2006-04-11

Fuqua, Shawntina (Department: 3742)

Electric resistance heating devices

Heating devices

Radiant heater

C392S418000, C219S390000, C219S405000, C219S411000, C118S724000, C118S725000, C118S050100

Reexamination Certificate

active

07027722

ABSTRACT:
An electric heater has multiple zones, wherein the multiple zones include at least one zone which is subject to high loading (e.g. bottom zone) and, at least one zone is a non-metal heating element, and the rest of the zones (e.g. middle zone and top zone) are metal resistance heating elements of light gauge overbent.

REFERENCES:
patent: 5324920 (1994-06-01), Nakao
patent: 6737613 (2004-05-01), Yamaguchi et al.
patent: 04-155828 (1992-05-01), None
patent: 2001-267249 (2001-09-01), None
patent: 2001-267261 (2001-09-01), None

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