Electricity: measuring and testing – Fault detecting in electric circuits and of electric components – Of individual circuit component or element
Reexamination Certificate
2004-08-25
2008-12-16
Nguyen, Ha (Department: 2829)
Electricity: measuring and testing
Fault detecting in electric circuits and of electric components
Of individual circuit component or element
C324S1540PB
Reexamination Certificate
active
07466151
ABSTRACT:
It comprises a voltage-application apparatus2for applying a predetermined voltage to a semiconductor device1, and holding it therein; a laser apparatus3for generating a laser beam4having a predetermined wavelength; an irradiation apparatus5for irradiating the laser beam4onto the two-dimensional circuit of the semiconductor device1, which is held in the applied state, so as to scan it two-dimensionally; an electromagnetic-wave detection/conversion apparatus6for detecting an electromagnetic wave, which is radiated from the laser-beam irradiation position, and converting the electromagnetic wave into an electric-field signal, which changes temporally; and phase-judgement means71, to which the temporally-changing electric-field signal output from the detection/conversion apparatus6is input, for judging the phase of the electric-field signal.
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Hirosumi Tomoya
Ohtake Hideyuki
Tonouchi Masayoshi
Yoshida Makoto
Aisin Seiki Kabushiki Kaisha
Isla Rodas Richard
Nguyen Ha
Sughrue & Mion, PLLC
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