Radiant energy – Electron energy analysis
Patent
1987-04-30
1988-08-16
Fields, Carolyn E.
Radiant energy
Electron energy analysis
250310, 250396R, H01J 4700
Patent
active
047646730
ABSTRACT:
In an electron spectrometer, electrons emanating from a source are collected and focused to a collimated stream by an electrostatic lens free of spherical aberration. The lens includes a pair of axially spaced concave grids approximating sections of concentric ellipsoids having a common focii and coaxial semi-major axes. The collimated electron stream is inducted into an electric radial cylindrical analyzer for focusing the electrons into radially dispersed lines on a position-sensitive detector with the radial dispersion being a function of their energies. The cylindrical analyzer section subtends an angle of approximately 63.5.degree.. The grid openings in the grids of the electrostatic collimating lens are elongated in a direction transverse to the stream of the electrons passing therethrough and parallel to the radial electric field lines at the entrance to the electric analyzer to reduce the dispersive effect of the grids.
REFERENCES:
patent: 3679896 (1972-07-01), Wardly
patent: 3805068 (1974-04-01), Lee
patent: 4179604 (1979-12-01), Christou
patent: 4553029 (1985-11-01), Matsuda
Bryson, III Charles E.
Kelly Michael A.
Aine Harry E.
Fields Carolyn E.
Kevex Corporation
Miller John A.
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