Electric discharge processing of thin films

Details Electric discharge processing of thin films Electric discharge processing of thin films

1984-02-08

1987-04-28

Pianalto, Bernard D.

Coating processes

Electrical product produced

Integrated circuit, printed circuit, or circuit board

427 75, B05D 306

Patent

active

046613706

ABSTRACT:
A deposited film is processed in a preselected pattern by discharging electric energy through the film across a gas dielectric. In a preferred embodiment, a voltage pulse chain is applied to a moving probe spaced a preselected distance from the film. The discharge either removes the film material over the pattern to expose underlying material, or produces a conductive path from the top to the bottom of the film.

REFERENCES:
patent: 3296011 (1967-01-01), McBride et al.
patent: 4269867 (1981-05-01), Altorfer et al.

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