Electric lamp and discharge devices – With temperature modifier – For lead-in-seal or stem protection
Patent
1987-05-12
1989-02-28
Moore, David K.
Electric lamp and discharge devices
With temperature modifier
For lead-in-seal or stem protection
328235, 313 62, 2504921, H05H 1300
Patent
active
048089400
DESCRIPTION:
BRIEF SUMMARY
TECHNICAL FIELD
The present invention relates to an electron beam accelerator in which radiant light is obtained by accumulating high energy through the process of making electrons injected from an injector revolve along an equilibrium orbit.
BACKGROUND TECHNIQUE
Heretofore, among such type of electron beam accelerators the so-called weak convergence type electron synchrotron has been known. In the weak convergence type synchrotron, an inflector for guiding an incident electron beam onto an equilibrium orbit and an accelerating electrode for accelerating electrons on an equilibrium orbit are disposed within a magnetic field, and thereby it is attempted to reduce the size of the entire apparatus. Such weak convergence type synchrotrons can be utilized as lithography beam sources or the like by externally deriving radiant light generated by electrons on an equilibrium orbit.
However, in the case where an inflector and an accelerating electrode are disposed within a magnetic field, there is a shortcoming that a radiant light derivable scope in which radiant light can be externally derived is limited. Furthermore, since normally a beam diagnostic apparatus, a vacuum instrument and the like are also disposed in the radiant light derivable scope, partially the position where radiant light can be derived is limited to a very one part of the radiant light derivable scope.
One object of the present invention is to provide an electron beam accelerator in which the scope of the radiant light is enlarged so that the radiant light can be derived efficiently.
DISCLOSURE OF THE INVENTION
According to the present invention, there is provided an electron beam accelerator of the type that it can derive radiant light generated by revolving electrons along an equilibrium orbit and also it is provided with an inflector for guiding electrons to the equilibrium orbit, which comprises drive means for driving the inflector in the directions perpendicular to the plane defined by the equilibrium orbit to make the inflector retire to a position where the radiant light may not strike the inflector.
According to the present invention, it has been found that an inflector is necessary only when electrons are injected, it is unnecessary when electrons are accelerated, and rather it becomes an obstacle for radiant light when the radiant light is utilized, and thereby there is provided an electron beam accelerator in which an inflector is made to retire to a position where radiant light may not strike the inflector upon utilization of the radiant light so that the radiant light can be derived also from the scope of the inflector. By sheltering an inflector from radiant light in the above-described manner, adverse effects caused by radiant light striking an inflector, can be also eliminated.
BRIEF DESCRIPTION OF THE DRAWINGS
FIG. 1 is a plan cross-section view for explaining an electron beam accelerator to which the present invention is applicable;
FIG. 2 is a cross-section view taken along line 2--2 in FIG. 1;
FIG. 3 a cross-section view showing one example of an inflector in the prior art which is available in the electron beam accelerator shown in FIGS. 1 and 2;
FIG. 4 is a cross-section view showing another example of an inflector in the prior art;
FIG. 5 is a cross-section view for explaining an inflector according to one preferred embodiment of the present invention; and
FIG. 6 is a cross-section view for explaining an inflector according to another preferred embodiment of the present invention.
THE BEST MODE FOR EMBODYING THE INVENTION
In order to facilitate understanding of the present invention, at first description will be made on an electron beam accelerator in the prior art with reference to FIGS. 1 to 4. In FIGS. 1 and 2 is shown a weak convergence type electron synchrotron as an electron beam accelerator. The illustrated synchrotron comprises an iron core 11 which defines a hollow space on its inside, and a pair of coils 12 are disposed along the inner wall of the iron core 11. In addition, within the hollow space
Moore David K.
Sumitomo Heavy Industrie's, Ltd.
Wieder K.
LandOfFree
Electric beam accelerator does not yet have a rating. At this time, there are no reviews or comments for this patent.
If you have personal experience with Electric beam accelerator, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Electric beam accelerator will most certainly appreciate the feedback.
Profile ID: LFUS-PAI-O-1371074