Electric arc coating device having an additional ionization anod

Details Electric arc coating device having an additional ionization anod Electric arc coating device having an additional ionization anod

1992-07-30

1994-03-15

Nguyen, Nam X.

Chemistry: electrical and wave energy

Apparatus

Vacuum arc discharge coating

20419238, C23C 1432

Patent

active

052943224

ABSTRACT:
An electric arc coating is comprised of a chamber with a chamber wall for receiving the substrates to be coated. The chamber can be evacuated and be optionally filled with a reaction gas or an inert gas. The device has at least one cathode connected to a first direct current source positioned within the chamber so as to be electrically insulated. The cathode is consumed by the electric arc. A second direct current source having a higher voltage than the first direct current source is connected with its negative pole to the substrates to be coated and is electrically insulated from the chamber. A first and a second anode are provided whereby the second anode is electrically insulated from the first anode and connected to a third current source. The positive poles of the first and the second current sources are connected to at least the first anode.

REFERENCES:
patent: 3793179 (1974-02-01), Sablev et al.
patent: 4620913 (1986-11-01), Bergman
patent: 5061684 (1991-10-01), Freller et al.
H. Randhawa et al., "Technical Note: A Review . . . Applications", Surface and Coatings Technology, 31(1987) pp. 303-318.
Von Engin Erturk; Verschleissschutz durch TiN-Beschichtung nach dem Ion Bond-Verfahren; Jan. 1987; pp. 89-94.

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