Electret covered with an insulated film and an electret...

Details Electret covered with an insulated film and an electret... Electret covered with an insulated film and an electret...

2004-11-12

2009-11-17

Ensey, Brian (Department: 2614)

Electrical audio signal processing systems and devices

Electro-acoustic audio transducer

Microphone capsule only

C381S174000

Reexamination Certificate

active

07620192

ABSTRACT:
A silicon nitride film (103) and a silicon nitride film (106) are formed to cover a charged silicon oxide film (105) serving as an electret.

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