Electret condenser

Details Electret condenser Electret condenser

2005-02-07

2010-12-14

Le, Huyen D (Department: 2614)

Electrical audio signal processing systems and devices

Electro-acoustic audio transducer

Microphone capsule only

C381S175000, C381S191000

Reexamination Certificate

active

07853027

ABSTRACT:
An electric condenser includes a fixed film110including a conductive film118to be an upper electrode, a vibrating film112including a lower electrode104and a silicon oxide film105to be an electric film, and a silicon oxide film108provided between the fixed film110and the vibrating film112and including an air gap109. Respective parts of the fixed film110and the vibrating film112exposed in the air gap109are formed of silicon nitride films106and114.

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