Optical: systems and elements – Optical modulator – Light wave temporal modulation
Reexamination Certificate
2006-08-15
2006-08-15
Dang, Hung Xuan (Department: 2873)
Optical: systems and elements
Optical modulator
Light wave temporal modulation
Reexamination Certificate
active
07092138
ABSTRACT:
A new design and fabrication process of an elastomer spatial light modulator (eSLM). The present invention resolves many known challenges and enables the eSLM to operate as programmable masks for the EUV lithography systems. Bottom electrodes are deposited and patterned on an insulation layer. A sacrificial layer is then deposited, patterned and polished on top of the bottom electrodes. A nitride shell forms a protection layer that prevents out-gassing and degradations of elastomer during operations. The sacrificial layer is removed, forming a cavity. An elastomer is injected at one end of the cavity and pulled into it by capillary forces. In an embodiment, the eSLM comprises a 2-D array of elastomer pillars, each containing a capacitive actuator with an elastomer as the supporting and dielectric structure. A stack of Mo/Si multilayer mirror is deposited on the surface to achieve a high reflectivity about 70% or more in EUV.
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Jung Il Woong
Solgaard Olav
Wang Jen-Shiang
Dang Hung Xuan
Lumen Intellectual Property Services, Inc
The Board of Trustees of the Leland Stanford Junior University
Tra Tuyen
LandOfFree
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