Equipment for production – distribution – or transformation of ene – Distribution – modification or control – Semiconductor – transistor or integrated circuit
Design Patent
2011-03-01
2011-03-01
Sikder, Selina (Department: 2912)
Equipment for production, distribution, or transformation of ene
Distribution, modification or control
Semiconductor, transistor or integrated circuit
Design Patent
active
D0633452
CLAIM:
The ornamental design for an elastic membrane for semiconductor wafer polishing apparatus, as shown and described.
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Fukushima Makoto
Nabeya Osamu
Namiki Keisuke
Togashi Shingo
Watanabe Katsuhide
Ebara Corporation
Sikder Selina
Sughrue & Mion, PLLC
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