Elastic foamed sheet and wafer-polishing jig using the sheet

Details Elastic foamed sheet and wafer-polishing jig using the sheet Elastic foamed sheet and wafer-polishing jig using the sheet

1993-03-23

1995-04-25

Davis, Jenna L.

Stock material or miscellaneous articles

Web or sheet containing structurally defined element or...

Composite having voids in a component

4283142, 4283157, H01L 2100, B24B 3704

Patent

active

054097703

ABSTRACT:
An elastic foamed sheet is disclosed which is usable as waxless polishing backing pads for wafers and capable of producing mirror polish wafers excelling in flatness.
This elastic foamed sheet possesses at least a foamed layer 2 and is characterized by the fact that a plurality of bubbles 4 in the foamed layer 2 meet the following conditions:

REFERENCES:
patent: 3284274 (1966-11-01), Hulslander et al.
patent: 4841680 (1989-06-01), Hoffstein et al.

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