Elastic boundary wave device, resonator, and filter

Details Elastic boundary wave device, resonator, and filter Elastic boundary wave device, resonator, and filter

2007-02-28

2008-12-30

Summons, Barbara (Department: 2817)

Wave transmission lines and networks

Coupling networks

Electromechanical filter

C333S195000, C310S31300R, C310S31300R

Reexamination Certificate

active

07471171

ABSTRACT:
An elastic boundary wave device includes a LiNbO3substrate, an electrode exciting an elastic wave and provided on the substrate, and a silicon oxide film provided on the substrate to cover the electrode, and parameters of the elastic boundary wave device have any one of ranges, where “θ” is a rotation Y cut angle of the substrate, “a” is a ratio of copper density with respect to a density of a material used as the electrode, “λ” is a wavelength of the elastic wave excited by the electrode, “h” is a film thickness of the electrode, “H” is a thickness of the silicon oxide film.

REFERENCES:
patent: 4484098 (1984-11-01), Cullen et al.
patent: 7224101 (2007-05-01), Mishima et al.
patent: 7310027 (2007-12-01), Kando
patent: 2007/0176711 (2007-08-01), Kando
patent: 2003-209458 (2003-07-01), None
patent: WO 2005/036743 (2005-04-01), None
patent: WO 2005/036744 (2005-04-01), None
Masatsune Yamaguchi et al.; “Highly Piezoelectric Boundary Waves in Si/siO2/LiNbO3Structure”; Proceeding of 1998 IEEE; International Frequency Control Symposium; IEEE; pp. 484-488; The United States of America.

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