Electrical generator or motor structure – Non-dynamoelectric – Piezoelectric elements and devices
Reexamination Certificate
2007-05-29
2007-05-29
Budd, Mark (Department: 2834)
Electrical generator or motor structure
Non-dynamoelectric
Piezoelectric elements and devices
C310S31300R
Reexamination Certificate
active
10984836
ABSTRACT:
An elastic boundary wave device includes a first piezoelectric substrate, IDTs arranged thereon, a first dielectric film having a smoothed surface that covers the IDTs, a second substrate that is a silicon-based substrate, and a second dielectric film provided on a main surface of the second substrate. The smoothed surface of the first dielectric surface and a surface of the second dielectric film are joined together.
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International Publication No. WO 98/51011, published Nov. 11, 1998.
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Hideki Takagi; Room-Temperature Bonding of Silicon Wafers by means of the Surface Activation Method;Report of Mechanical Engineering Laboratory No. 189; Dec. 2000; pp. 76-84.
Mishima Naoyuki
Miura Michio
Arent & Fox LLP
Budd Mark
Fujitsu Limited
Fujitsu Media Devices Limited
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