Optics: measuring and testing – By alignment in lateral direction – With light detector
Patent
1995-04-17
1996-02-20
Evans, F. L.
Optics: measuring and testing
By alignment in lateral direction
With light detector
356401, 355 53, 250548, G01B 1100
Patent
active
054934028
ABSTRACT:
An alignment method for aligning each of plural process areas arranged on a substrate to a specified point in a fixed coordinate system defining a position of movement of the substrate, comprises measuring the positions of a number of specified areas, selected in advance from the plural process areas on the substrate; determining plural amounts of deformation between the specified areas and one of the process areas; determining plural weighting coefficients corresponding to the plural amounts of distortion, for each of the specified areas; and calculating the coordinate position of the one of the process areas on the fixed coordinate system, by statistical processing of the measured coordinate positions of the specified areas, utilizing the plural weighting coefficients.
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patent: 5153678 (1992-10-01), Ota
patent: 5272501 (1993-12-01), Nishi et al.
Evans F. L.
Nikon Corporation
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