eFuse with partial SiGe layer and design structure therefor

Active solid-state devices (e.g. – transistors – solid-state diode – Integrated circuit structure with electrically isolated... – Passive components in ics

Reexamination Certificate

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Reexamination Certificate

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07960809

ABSTRACT:
A fuse includes a fuse link region, a first region and a second region. The fuse link region electrically connects the first region to the second region. A SiGe layer is disposed only in the fuse link region and the first region.

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C. Kothandaraman, et al.—“Electrically Programmable Fuse (eFUSE) Using Electromigration in Silicides”—IEEE Electron Device Letters, vol. 23, No. 9, Sep. 2002, pp. 523-525.
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