Effusion cells for molecular beam epitaxy apparatus

Details Effusion cells for molecular beam epitaxy apparatus Effusion cells for molecular beam epitaxy apparatus

1978-10-30

1980-12-16

Reynolds, B. A.

Electric heating

Heating devices

Resistive element: igniter type

13 31R, 219424, 219426, 338296, 338305, H01L 21203, H05B 306

Patent

active

042399556

ABSTRACT:
The effusion cell for molecular beam epitaxy apparatus consists of a pyrolytic BN cylindrical crucible surrounded by a heating coil. The position of the heating coil is maintained by a plurality of ceramic rods extending parallel to the cylinder axis with notches along their length for engaging the heating coil. The ceramic rods are secured by a retaining ring near the front of the crucible and an apertured disk near the back of the crucible. The entire assembly is surrounded by a foil heat shield.

REFERENCES:
patent: 688995 (1901-12-01), Gold
patent: 906990 (1908-12-01), Babcock
patent: 1432442 (1922-10-01), Collins
patent: 1707308 (1929-04-01), Keene
patent: 1976522 (1934-10-01), Rose, Jr.
patent: 2789153 (1957-04-01), Mark
patent: 3915765 (1975-10-01), Cho et al.

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