Effusion cell assembly

Details Effusion cell assembly Effusion cell assembly

1984-06-04

1985-11-12

Morgenstern, Norman

Electric heating

Heating devices

Resistive element: igniter type

219390, 219521, 118726, 156DIG103, C23C 1312

Patent

active

045530220

ABSTRACT:
An effusion cell assembly includes a self-supporting element disposed within a housing member. The self-supporting element provides efficient heat transfer to a crucible positioned therein and permits operation at relatively lower filament tempertures.

REFERENCES:
patent: 3667424 (1972-06-01), Cornelius et al.
patent: 3839084 (1974-10-01), Cho et al.
patent: 3925146 (1975-12-01), Olsen et al.
patent: 4239955 (1980-12-01), Cho
patent: 4426569 (1984-01-01), Miller et al.
patent: 4482799 (1984-11-01), Princenski et al.
Kubiak et al., "A Simple Source Cell Design for MBE", J. Vac. Sci. and Tech., vol. 20, pp. 252-253, 1982.
Norrman et al., "Highly Stabilized Evaporation Sources in a Water-Cooled Carousel Housing", J. Phys. E. Sci. Instrum., vol. 15, No. 7, Jul. 1982, pp. 731-735.

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