Effluent gas stream treatment system having utility for oxidatio

Details Effluent gas stream treatment system having utility for oxidatio Effluent gas stream treatment system having utility for oxidatio

1996-12-31

1999-09-21

Tran, Hien

Chemical apparatus and process disinfecting, deodorizing, preser

Chemical reactor

Waste gas purifier

422172, 422173, 422174, 55223, 552571, 55431, 55522, 406 46, 406 48, 406193, B01D 5334

Patent

active

059550376

ABSTRACT:
An effluent gas stream treatment system for treatment of gaseous effluents such as waste gases from semiconductor manufacturing operations. The effluent gas stream treatment system comprises a pre-oxidation treatment unit, which may for example comprise a scrubber, an oxidation unit such an electrothermal oxidizer, and a post-oxidation treatment unit, such as a wet or dry scrubber. The effluent gas stream treatment system of the invention may utilize an integrated oxidizer, quench and wet scrubber assembly, for abatement of hazardous or otherwise undesired components from the effluent gas stream. Gas or liquid shrouding of gas streams in the treatment system may be provided by high efficiency inlet structures.

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