Effluent-gas-scavenger system for process tube, minimizing back

Details Effluent-gas-scavenger system for process tube, minimizing back Effluent-gas-scavenger system for process tube, minimizing back

1997-12-29

1999-01-19

Walberg, Teresa

Heating

Work chamber having heating means

Work chamber having gaseous material supply or removal...

432152, 432253, F27B 504

Patent

active

058608052

ABSTRACT:
A dual-function scavenger system, especially useful in conjunction with ovens for processing semiconductor materials, wherein the spent process gases from the ovens are separated from their residual thermal energy for disposition through discrete channels. Back diffusion of atmospheric air into the ovens is minimized.

REFERENCES:
patent: 4976610 (1990-12-01), Yates
patent: 5118286 (1992-06-01), Sarin

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