Efficient generation of fill shapes for chips and packages

Details Efficient generation of fill shapes for chips and packages Efficient generation of fill shapes for chips and packages

1995-05-19

1997-06-03

Teska, Kevin J.

Boots, shoes, and leggings

364490, 395133, 395141, 345112, G06F 1750

Patent

active

056361335

ABSTRACT:
An efficient method for modifying a chip or package design allows for the creation of small shapes without excessive expansion of design data. A computer program takes a physical design, represented in a computer data file, and generates a modified version of the design in which fill shapes have been added. Subsequently, when the modified design is processed, the resulting semiconductor chip or package will contain physical images of the added fill shapes, with the effect of making local pattern density more uniform and hence reducing process-induced variations in feature size and shape.

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