Efficient EUV collector designs

Details Efficient EUV collector designs Efficient EUV collector designs

2008-07-29

2008-07-29

Lavarias, Arnel C (Department: 2872)

Optical: systems and elements

Having significant infrared or ultraviolet property

Having folded optical path

C359S350000, C359S858000, C359S857000, C355S067000, C378S034000, C313S114000

Reexamination Certificate

active

07405871

ABSTRACT:
A collector that includes a laser produced plasma (LPP) extreme ultra violet (EUV) light source and a first optical path from the source to a mirror. The mirror is the first mirror that light emitted from the source and traveling along the first optical path impinges upon. The collector also includes a second optical path from the source to another mirror. The other mirror is the first mirror that light emitted from the source and raveling along the second path impinges upon. The mirror and the other mirror are oriented relative to the source such that light from the source traveling along the first optical path travels in a direction opposite to light traveling from the source along the second optical path. A collector having a discharge extreme ultra violet (EUV) light source.

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