Edge with minimal diffraction effects

Details Edge with minimal diffraction effects Edge with minimal diffraction effects

2008-03-26

2011-12-06

Evans, Geoffreys (Department: 3742)

Electric heating

Metal heating

By arc

C219S121730

Reexamination Certificate

active

08071908

ABSTRACT:
Apparatuses and methods are provide thermally processing of the central portion of a substrate surface using a scanned photonic beam. Such thermal processing is carried out using a shield to block the beam from illuminating the side wall or peripheral portion of the substrate. The shield has characteristics, e.g., diffractive characteristics, effective to maintain the intensity of any unblocked portion of beam suitable for processing the central portion of the substrate surface.

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