Edge shrinkage compensated devices

Details Edge shrinkage compensated devices Edge shrinkage compensated devices

1992-02-19

1993-02-23

Griffin, Donald A.

Electricity: electrical systems and devices

Electrostatic capacitors

Fixed capacitor

257532, 257537, 257919, 338333, H01G 406, H01L 2702

Patent

active

051895951

ABSTRACT:
Improved, edge compensated capacitors and a method for making the same are presented. The present invention arranges individual cells of capacitors and uses passive dummy cells so as to achieve a ratio between the length of the exposed perimeters of the cells of the two capacitors that is equal to the desired capacitance ratio between the two capacitors. By doing so, the edge shrinkage effects on both cells are taken into account, and accurate capacitor ratios are maintained. In one embodiment of the invention the number of intersections between exposed edges of the cells of the two capacitors are also adjusted to conform to the capacitor ratio to achieve additional edge shrinkage compensation.

REFERENCES:
patent: 3273033 (1966-09-01), Rossmeisl
patent: 4990462 (1991-02-01), Sliwa
patent: 5079670 (1992-01-01), Tigelaar et al.
patent: 5087951 (1992-02-01), Chance et al.

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