Etching a substrate: processes – Gas phase etching of substrate – Etching inorganic substrate
Patent
1996-10-25
1998-02-03
Powell, William
Etching a substrate: processes
Gas phase etching of substrate
Etching inorganic substrate
216 33, 216 41, 216 56, B44C 122
Patent
active
057140782
ABSTRACT:
An edge-shooter ink-jet print head has a row of nozzles extending in the z-direction on the edge of a head module. The print head includes members into which chambers are formed which, in turn, are equipped with devices for ejecting ink from each chamber to respectively assigned ink nozzles. The ink jets are expelled in the x-direction. The print head comprises a plurality of plates stacked in the y-direction. The ink paths are of equal length at least within each module. In a prefered embodiment, the row of nozzles is formed in an additional part which is also a chamber carrying part. After the production of various module plates by parallel processing of a glass plate, including the formation of cavities of a defined depth by etching and fine grinding, the parts are separated and then joined to form a module. Conductor tracks and PZT elements are provided. The modules can be interconnected with an adhesive layer as part of an assembly process.
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Francotyp - Postalia GmbH
Greenberg Laurence A.
Lerner Herbert L.
Powell William
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