Edge inspection

Details Edge inspection Edge inspection

2008-03-04

2010-10-26

Patel, Kanji (Department: 2624)

Image analysis

Applications

Manufacturing or product inspection

C250S559360

Reexamination Certificate

active

07822260

ABSTRACT:
A semiconductor inspection tool comprises an edge top camera for obtaining images of a top edge of a wafer, an edge normal camera for obtaining images of a normal edge of the wafer, and a controller for receiving the images of the top edge of the wafer and the images of the normal edge of the wafer and for analyzing the images of the top edge of the wafer and the images of the normal edge of the wafer for wafer edge defects.

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