Edge inspection

Details Edge inspection Edge inspection

2004-07-14

2008-03-04

Patel, Kanjibhai (Department: 2624)

Image analysis

Applications

Manufacturing or product inspection

C250S559360

Reexamination Certificate

active

07340087

ABSTRACT:
A semiconductor inspection tool comprises an edge top camera for obtaining images of a top edge of a wafer, an edge normal camera for obtaining images of a normal edge of the wafer, and a controller for receiving the images of the top edge of the wafer and the images of the normal edge of the wafer and for analyzing the images of the top edge of the wafer and the images of the normal edge of the wafer for wafer edge defects.

REFERENCES:
patent: 4328553 (1982-05-01), Fredriksen et al.
patent: 4464705 (1984-08-01), Horowitz
patent: 4644172 (1987-02-01), Sandland et al.
patent: 4764969 (1988-08-01), Ohtombe et al.
patent: 4823394 (1989-04-01), Berkin et al.
patent: 5091963 (1992-02-01), Litt et al.
patent: 5497381 (1996-03-01), O'Donoghue et al.
patent: 5547537 (1996-08-01), Reynolds et al.
patent: 5592295 (1997-01-01), Stanton et al.
patent: 5640200 (1997-06-01), Michael
patent: 5641960 (1997-06-01), Okubo et al.
patent: 5787190 (1998-07-01), Peng et al.
patent: 5822055 (1998-10-01), Tsai et al.
patent: 5850466 (1998-12-01), Schott
patent: 5852413 (1998-12-01), Bacchi et al.
patent: 5856844 (1999-01-01), Battermann et al.
patent: 5859698 (1999-01-01), Chau et al.
patent: 5917588 (1999-06-01), Addiego
patent: 5949901 (1999-09-01), Nichani et al.
patent: 6137303 (2000-10-01), Deckert et al.
patent: 6140254 (2000-10-01), Endisch et al.
patent: 6147357 (2000-11-01), Nicolescu
patent: 6153361 (2000-11-01), Liu et al.
patent: 6314379 (2001-11-01), Hu et al.
patent: 6324298 (2001-11-01), O'Dell et al.
patent: 6412326 (2002-07-01), Hubbard et al.
patent: 6420792 (2002-07-01), Guldi et al.
patent: 6432800 (2002-08-01), Park
patent: 6565920 (2003-05-01), Endisch
patent: 6640151 (2003-10-01), Somekh et al.
patent: 6702302 (2004-03-01), Smedt et al.
patent: 6708074 (2004-03-01), Chi et al.
patent: 6778258 (2004-08-01), del Puerto et al.
patent: 6906794 (2005-06-01), Tsuji
patent: 7149341 (2006-12-01), Hayashi et al.
patent: 2003/0030050 (2003-02-01), Choi
patent: 2003/0202178 (2003-10-01), Tsuji et al.
International Search Report mailed Mar. 2, 2005 (3 pgs).

Affiliated with

Also associated with

Rating

Edge inspection does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Edge inspection, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Edge inspection will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-3975683