Edge illuminated photodetector with optical fiber alignment

Details Edge illuminated photodetector with optical fiber alignment Edge illuminated photodetector with optical fiber alignment

1979-01-02

1980-07-01

Edlow, Martin H.

357 55, 357 60, 350 9617, H01L 2714

Patent

active

042109230

ABSTRACT:
A silicon photodetector capable of long wavelength response which includes means for aligning an optical fiber for edge illumination. The detector is formed in a silicon body (11 and 12) with major surfaces lying in the (110) plane. A groove (23) is etched in the body adjacent the detector to produce sidewalls (24) and an end wall (25) lying in (111) planes. The sidewalls form a v-shaped groove with a depth precisely determined by the width of the groove so that an optical fiber (26) placed in the groove is vertically aligned with the detector. The end wall is perpendicular to the surface of the body so that light from the fiber is not refracted from the plane of the detector.

REFERENCES:
patent: 3646407 (1972-02-01), Meuleman
patent: 3774987 (1973-11-01), Boivin
patent: 3952265 (1976-04-01), Hunsperger
patent: 3994559 (1976-11-01), Crow
patent: 4083062 (1978-04-01), Ohuchi
patent: 4110781 (1978-08-01), Konishi
patent: 4137543 (1979-01-01), Beneking
Conradi et al, I.E.E.E. Trans. on Electron Devices, vol ED-25, No. 2, Feb. 1978.

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