Cleaning and liquid contact with solids – Processes – Work handled in bulk or groups
Reexamination Certificate
2005-01-25
2005-01-25
Stinson, Frankie L. (Department: 1746)
Cleaning and liquid contact with solids
Processes
Work handled in bulk or groups
C134S133000, C134S165000, C134S902000, C118S503000, C206S711000
Reexamination Certificate
active
06845779
ABSTRACT:
A microelectronic substrate handling device comprising first and second support structures spaced from each other, the first support structure having a series of upper teeth defining a series of upper notches extending along a length of the first support structure and a series of lower teeth defining a series of lower notches extending along a length of the first support structure, each of the upper and lower notches opening toward the second support structure, wherein the upper and lower notches are offset from each other by a predetermined offset distance so that an edge of a microelectronic device will fit differently within the upper and lower notches of the first support structure when supported between the first and second support structures.
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PCT International Search Report, PCT/US02/36168 (3 pages), Apr. 22, 2003.
Gast Tracy A.
Herbst Tim W.
Maciej Todd K.
Siefering Kevin L.
Wagener Thomas J.
FSI International Inc.
Kagan Binder PLLC
Perrin Joseph L.
Stinson Frankie L.
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