Edge geometry superconducting tunnel junctions utilizing an NbN/

Details Edge geometry superconducting tunnel junctions utilizing an NbN/ Edge geometry superconducting tunnel junctions utilizing an NbN/

1991-01-16

1992-03-24

James, Andrew J.

Superconductor technology: apparatus, material, process

High temperature , per se

Having tc greater than or equal to 150 k

357 4, 505862, 505871, H01L 3922, H01L 2712, H01L 4500, H01L 4902

Patent

active

050992945

ABSTRACT:
An edge defined geometry is used to produce very small area tunnel junctions (30) in a structure with niobium nitride superconducting electrodes (14, 28) and a magnesium oxide tunnel barrier (24). The incorporation of an MgO tunnel barrier with two NbN electrodes results in improved current-voltage characteristics, and may lead to better junction noise characteristics. The NbN electrodes are preferably sputter-deposited, with the first NbN electrode deposited on an insulating substrate maintained at about 250.degree. to 500.degree. C. for improved quality of the electrode.

REFERENCES:
patent: 4768069 (1988-08-01), Talvacchio
patent: 4831421 (1989-05-01), Gallagher et al.

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