Edge flaw detection device

Details Edge flaw detection device Edge flaw detection device

2005-08-10

2009-11-10

Stafira, Michael (Department: 2886)

Optics: measuring and testing

Inspection of flaws or impurities

C356S237200

Reexamination Certificate

active

07616300

ABSTRACT:
An edge flaw detection device includes an elliptical mirror having a mirror surface on the inside thereof and having a cutout that allows an object to be inserted therethrough formed at the apex thereof, a light-emitting unit that radiates coherent light toward an edge of the object arranged in the vicinity of a first focal position of the elliptical mirror, a photo detector that is arranged in a second focal position of the elliptical mirror, and a light-shielding member that shields low-order diffracted light that is reflected regularly. The light-emitting unit is moved in the thickness direction of the object by a moving member so that the light-emitting unit can radiate the coherent light in a different radiation range in the thickness direction at the edge of the object.

REFERENCES:
patent: 6476393 (2002-11-01), Yoshida et al.
patent: 6798503 (2004-09-01), Hiramoto et al.
patent: 2003/0184743 (2003-10-01), Hiramoto et al.
patent: 11/351850 (1999-12-01), None
patent: 2003/287412 (2003-10-01), None
patent: 2000-55815 (2005-02-01), None
International Search Report mailed Nov. 15, 2005.

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