Edge detector

Details Edge detector Edge detector

1992-11-20

1994-04-19

Nguyen, Vinh

Electricity: measuring and testing

Measuring, testing, or sensing electricity, per se

With rotor

324 731, 324158D, 250306, 250307, G01R 1100

Patent

active

053049241

ABSTRACT:
An edge detector is disclosed, which detector is improved by providing a probe moving relatively with a tested pattern, a device for detecting a working force or a tunnel current generated between the probe and the tested pattern, and a device for detecting an edge of the tested pattern according to the detected working force or tunnel current. An edge of the tested pattern is detected at high resolution by detecting the tunnel current flowing between a conductive tested pattern and a probe kept closely opposite thereto, or by detecting an atomic force or a magnetic force working between an insulated or a magnetic tested pattern and a lever.

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