Edge constrained optical membrane deformable mirror and...

Optical: systems and elements – Mirror – Including specified control or retention of the shape of a...

Reexamination Certificate

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Reexamination Certificate

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07547107

ABSTRACT:
Fabricating a deformable mirror by providing a plurality of actuators and a support structure supporting and at least partially surrounding the actuators; applying an optical membrane across the actuators and at least a portion of the support structure; the optical membrane including a first area, a second area and an intermediate area elastically decoupling the first and second areas; bonding the first area to the actuators and the second area to the support structure; and polishing the optical membrane.

REFERENCES:
patent: 5357825 (1994-10-01), Costello et al.
patent: 5940203 (1999-08-01), LaFiandra
patent: 2003/0203530 (2003-10-01), Lee et al.
patent: 2004/0027632 (2004-02-01), Watson
patent: 2005/0128558 (2005-06-01), Ealey
patent: 2006/0050421 (2006-03-01), Ealey

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