Edge barrier of polysilicon and metal for integrated circuit chi

Details Edge barrier of polysilicon and metal for integrated circuit chi Edge barrier of polysilicon and metal for integrated circuit chi

1980-05-16

1982-12-14

Clawson, Jr., Joseph E.

357 54, 357 59, H01L 2934

Patent

active

043640788

ABSTRACT:
An aluminum over silicon barrier extends over the lateral edges of an integrated circuit chip into adjacent scribe lines forming an edge barrier.

REFERENCES:
patent: 4012762 (1977-03-01), Abe et al.
patent: 4080619 (1978-03-01), Suzuki
patent: 4114254 (1978-09-01), Aoki et al.

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