ED inverter circuit and integrate circuit element including...

Active solid-state devices (e.g. – transistors – solid-state diode – Heterojunction device – Field effect transistor

Reexamination Certificate

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C257S392000, C257SE27061

Reexamination Certificate

active

07821035

ABSTRACT:
A second semiconductor layer of a second nitride-based compound semiconductor with a wider bandgap formed on a first semiconductor layer of a first nitride-based compound semiconductor with a smaller bandgap includes an opening, on which a gate insulating layer is formed at a portion exposed through the opening. A first source electrode and a first drain electrode formed across a first gate electrode make an ohmic contact to the second semiconductor layer. A second source electrode and a second drain electrode formed across a second gate electrode that makes a Schottky contact to the second semiconductor layer make an ohmic contact to the second semiconductor layer.

REFERENCES:
patent: 6670652 (2003-12-01), Song
patent: 7038253 (2006-05-01), Yoshida et al.
patent: 2006/0157729 (2006-07-01), Ueno et al.
patent: 2008/0173898 (2008-07-01), Ohmaki
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patent: 2001-160656 (2001-06-01), None
patent: 2004-235473 (2004-08-01), None
patent: 2006-253559 (2006-09-01), None
patent: 2007-66963 (2007-03-01), None
patent: WO 03/071607 (2003-08-01), None
Wataru Saito, et al., “Recessed-Gate Structure Approach Toward Normally Off High-Voltage AlGaN/GaN HEMT for Power Electronics Applications,” IEEE Transactions on Electron Devices, vol. 53, No. 2, Feb. 2006, pp. 356-362.
Yong Cai, et al., “Monolithically Integrated Enhancement/Depletion-Mode AlGaN/GaN HEMT Inverters and Ring Oscillators Using CF4Plasma Treatment,” IEEE Transactions on Electron Devices, vol. 53, No. 9, Sep. 2006, pp. 2223-2230.

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