Easy access chemical chamber window and frame

Details Easy access chemical chamber window and frame Easy access chemical chamber window and frame

1998-05-13

1999-11-30

Kunemund, Robert

Adhesive bonding and miscellaneous chemical manufacture

Differential fluid etching apparatus

With microwave gas energizing means

118733, C23C 1600, C23F 102

Patent

active

059935995

ABSTRACT:
A chemical etching chamber window apparatus includes a window, and a window housing harbored in a frame assembly, where the frame assembly includes grooves and a clamp for securing the window housing within the frame assembly, an opening for entry and removal of the window housing, a lower piece comprising a troth formed at an angle that allows fluid to flow toward the inside of the etching chamber, and weeping holes that allow fluid to drain into the etching chamber.

REFERENCES:
patent: 4676261 (1987-06-01), Blaul
patent: 5205059 (1993-04-01), Doll
patent: 5851343 (1998-12-01), Hsu et al.
patent: 5873199 (1999-02-01), Meunier et al.

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