Early error detection during fabrication of reticles

Details Early error detection during fabrication of reticles Early error detection during fabrication of reticles

2005-08-17

2009-08-18

Werner, Brian P (Department: 2624)

Image analysis

Applications

Manufacturing or product inspection

Reexamination Certificate

active

07577287

ABSTRACT:
The reticle fabrication system of the present invention includes a first preparatory processor, a second preparatory processor, a comparison/determination unit, a first converter, and a second converter. The first preparatory processor performs preparatory processing for converting CAD data to plotting data, and the second preparatory processor carries out preparatory processing for converting the CAD data to inspection data. The comparison/determination unit compares the content of the preparatory processing of the first preparatory processor and the content of the preparatory processing of the second preparatory processor, and upon determining, based on the results of comparison, that the preparatory processing has been carried out correctly, permits the actual conversion of the CAD data. When the conversion of CAD data has been permitted, the first converter converts the CAD data to plotting data, and the second converter converts the CAD data to inspection data.

REFERENCES:
patent: 6704695 (2004-03-01), Bula et al.
patent: 6760892 (2004-07-01), Taoka et al.
patent: 6907587 (2005-06-01), Rittman et al.
patent: 2004/0044981 (2004-03-01), Yoshimura et al.
patent: 11-329929 (1999-11-01), None
patent: 2000-250960 (2000-09-01), None
patent: 2003-303213 (2003-10-01), None
patent: 2004-094044 (2004-03-01), None

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